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changes.mady.by.user Peter Blomqvist

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changes.mady.by.user Alexander Den Ouden

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titleTechnical information
  • ZEISS LEO - 1560 Scanning Electron Microscope (SEM)
  • Schottky field emission gun
  • In-lens SE & E-T SE detectors
  • Capable of 1nm resolution at 20kV
  • 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door


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titleTool Overview

Responsible: Alexander den Ouden & PB

Location: Room Q255, (Level 2)

License and Booking Required: Yes


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titleDocumentation

User Manuals

Process

Staff Documents



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titleOther Links

Safety Information

View on LIMS

FAQ

User Discussion Forum


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