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Responsible: Dmitry Suyatin Luke Hankin Location: Room Q156, EBL-Lab (Cleanroom Level 1) License and Booking Required: Yes Supplier: Plasma-Therm ? / Advanced Vacuum Systems AB |
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Unprotected surfaces of the following materials are not allowed: glasses, noble metals (Au, Ag, Pt, Cu, Pd), heavy metals (Cd, Pb, Zn) and certain types of polymers (e.g. silicones). Wafer clamps for 2 inch, 6 inch and 8 inch wafers are also available. |
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Safety InformationView on LIMSFAQUser Discussion Forum |