Versions Compared

Old Version 10

changes.mady.by.user Sarah McKibbin

Saved on

compared with

New Version Current

changes.mady.by.user Unknown User (su3308ju)

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.




Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTechnical information
  • Tomas Swan showerhead MOCVD system for nitride semiconductors.
  • Showerhead and susceptor for 3x2 inch or 1x 4inch.
  • Laytec in-situ optical monitoring available.
  • Susceptor temperature up to 1100C.
  • Precursors: NH3, TMG, TEG, TMI, TMA.
  • Dopants: SiH4 and CP2Mg.
  • Main applications: Growth of GaN, InGaN and visible light emitting LED structuresMain application:


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTool Overview

Responsible:  Sungyoun Zhaoxia Bi & Sungyoun Ju

Location: Room Q2XXQ252, Level 2

License and Booking Required: Yes


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleDocumentation

User Manuals

Process

Staff Documents



Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleOther Links

Safety

View on LIMS

FAQ

User Discussion Forum