• Tomas Swan showerhead MOCVD system for nitride semiconductors.
• Showerhead and susceptor for 3x2 inch or 1x 4inch.
• Laytec in-situ optical monitoring available.
• Susceptor temperature up to 1100C.
• Precursors: NH3, TMG, TEG, TMI, TMA.
• Dopants: SiH4 and CP2Mg.
• Main applications: Growth of GaN, InGaN and visible light emitting LED structures

Responsible: Zhaoxia Bi & Sungyoun Ju

Location: Room Q252, Level 2

License and Booking Required: Yes

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