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titleTechnical information
  • Hitachi SU8700 Scanning Electron Microscope (SEM)
  • Schottky field emission gun
  • Detectors:
    • In-lens SE & EsB
    • E-T SE
    • aSTEM
    • UVD (Ultra Variable-Pressure detector)
    • EDS Bruker Flatquad - To be installed later
  • 6" load-lock
  • Variable pressure capability from 5-300Pa



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titleTool Overview

Responsible: ~ftf-pbo & Alexander den Ouden

Location: Room Q241, (Level 2)

License and Booking Required: Yes



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titleDocumentation

User Manuals

Process

Examples - Hitachi SU8700

Staff Documents



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titleOther Links

Safety Information 

View on LIMS

FAQ

User Discussion Forum