Hitachi SU8700 Scanning Electron Microscope (SEM)
Schottky field emission gun
Detectors:
In-lens SE & EsB
E-T SE
aSTEM
UVD (Ultra Variable-Pressure detector)
EDS Bruker Flatquad
6" load-lock
Variable pressure capability from 5-300Pa
Responsible: David Alcer
Location: Room Q241
License and Booking Required: Yes
User Manuals
Process
Examples - Hitachi SU8700
Staff Documents
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