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titleTool Overview

Responsible: Sarah McKibbin and Anders Kvennefors

Location: Room Q158, EVA-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Lamination of dry film resists


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titleTechnical information
  • Loading plate for 4" wafers
  • 65cm laminating width available
  • SUEX films available (testing phase)
  • Temperature control up to 149C



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titleDocumentation

User Manual

Process

Documents for the tool



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titleOther Links

View on LIMS


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