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Tool Summary

  • Tool Responsible: David Fitzgerald

  • Location: EVA Lab

  • Maximum wafer size: 4" (100 mm)

  • Materials available: Au, Ti, Ni, Al, Cr

  • FAQ

     

 Short User Manual

 User Manuals

         

 
View file
nameUser Manual.pdf
height150
 

  


          Lab Camera

CLEANROOM CAM