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Lund Nano Lab
Thin Films
E-Beam Evaporator - Temescal
Page History
Versions Compared
Old Version
37
changes.mady.by.user
user-ae6de
Saved on
2019 Mar 12
compared with
New Version
38
changes.mady.by.user
user-ae6de
Saved on
2019 Mar 12
Previous Change: Difference between versions 36 and 37
Next Change: Difference between versions 38 and 39
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Tool Summary
Tool Responsible:
David Fitzgerald
Location: EVA Lab
Maximum wafer size: 4" (100 mm)
Materials available: Au, Ti, Ni, Al, Cr
FAQ
Short User Manual
View file
name
User Manual.pdf
height
150
Lab Camera
Overview
Content Tools
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