Versions Compared

Old Version 4

changes.mady.by.user user-ae6de

Saved on

compared with

New Version 5

changes.mady.by.user user-ae6de

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.

Tool Summary

Location: EVA Lab

Maximum wafer Size: 4" (100 mm)

Materials available: Au, Ti, Ni, Al, Cr

Tool Responsible: David Fitzgerald