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titleTechnical information
  • ZEISS GeminiSEM 500 Scanning Electron Microscope (SEM)
  • Schottky field emission gun
  • Detectors:
    • In-lens SE & EsB
    • E-T SE
    • aBSD
    • aSTEM
    • EDS and EBSD (Oxford Instruments)
  • Load-lock
  • Plasma cleaner



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titleTool Overview

Responsible: Peter Blomqvist & Anders Kvennefors

Location: Room Q260, (Level 2)

License and Booking Required: Yes



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titleDocumentation

User Manuals

Process

Examples - ZEISS Gemini500

Staff Documents



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titleOther Links

Safety Information 

View on LIMS

FAQ


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