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Tool Summary

  • Location: Insert lab name or room number

  • List main tool capabilites here

  • FAQ

       User Manuals

       Staff Documents


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titleTechnical information
  • E-beam evaporator
  • Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu
  • Maximum wafer size: 6" (150 mm)



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titleTool Overview

Responsible: David Fitzgerald

Location: Room Q158, EVA-Lab (Level 1)

License and Booking Required: Yes



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User Manuals

Staff Documents



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Safety Information

View on LIMS

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