Tool Summary
Panel | ||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ||||||||||||||
|
|
Ideal for etching Si, SiO2, and polymers (resists), and resist stripping.
|
Panel | ||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ||||||||||||||
Responsible: Sarah McKibbin and Alex den Ouden Location: Room Q156, EBL-Lab (Cleanroom Level 1) License and Booking Required: Yes |
Panel | ||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
FAQ
User ManualsProcessStaff Documents |
Panel | |||
---|---|---|---|
|
| |||||||||||
Safety InformationView on LIMS |
FAQs |