Tool Summary

• Tool Responsible: Sarah McKibbin

• Location: Q161 UVL Lab (Level 1)

• Maximum wafer size: 

• Tool Information:

  • Wavelength: 240nm to 320nm.
  • Deep UV contact mask aligner, strongly damped soft UV region.
  • Exposure of small pieces and full wafers.
  • 4" max wafers.
  • Mask sizes 3.5", 4" and 5".

• FAQ

Safety

User Manuals

Process

Staff Documents

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