Tool Summary
Tool Responsible: Peter Blomqvist & Anders Kvennefors
Location: Q260
License required: YES
Tool information:
- Zeiss GeminiSEM 500
- Schottky field emission
- Detectors: In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD
- Plasma cleaner
FAQ
Safety
User Manuals
Process
Staff Documents
View on LIMS
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