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Lund Nano Lab
Thin Films
E-Beam Evaporator - Temescal
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Old Version
81
changes.mady.by.user
user-ae6de
Saved on
2020 Jun 04
compared with
New Version
82
changes.mady.by.user
user-ae6de
Saved on
2020 Jun 04
Previous Change: Difference between versions 80 and 81
Next Change: Difference between versions 82 and 83
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Tool Summary
Tool Responsible:
David Fitzgerald
Location: EVA Lab
Maximum wafer size: 6" (150 mm)
Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu
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