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Tool Summary

  • Tool Responsible:

     David Fitzgerald

    Peter Blomqvist

  • Location: EVA Lab

  • Maximum wafer size:

    6" (150 mm)

     

  • Materials available:

    Au, Ti, Ni, Al, Cr, Pd, Cu

  • FAQ

    - AJA Sputter - Orion 5

Safety

User Manuals

Process

Staff Documents


    


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