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Lund Nano Lab
Thin Films
E-Beam Evaporator - Temescal
Page History
Versions Compared
Old Version
68
changes.mady.by.user
user-ae6de
Saved on
2020 May 05
compared with
New Version
69
changes.mady.by.user
user-ae6de
Saved on
2020 May 05
Previous Change: Difference between versions 67 and 68
Next Change: Difference between versions 69 and 70
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Tool Summary
Tool Responsible:
David Fitzgerald
Location: EVA Lab
Maximum wafer size: 6" (150 mm)
Materials available: Au, Ti, Ni, Al, Cr, Pd, Cu
FAQ
- Temescal
Safety
- Temescal
User Manuals
- Temescal
Process
Staff Documents
- Temescal
Overview
Content Tools
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