Technical information
- Tomas Swan showerhead MOCVD system for nitride semiconductors.
- Showerhead and susceptor for 3x2 inch or 1x 4inch.
- Laytec in-situ optical monitoring available.
- Susceptor temperature up to 1100C.
- Precursors: NH3, TMG, TEG, TMI, TMA.
- Dopants: SiH4 and CP2Mg.
- Main applications: Growth of GaN, InGaN and visible light emitting LED structures
Tool Overview
Responsible: Zhaoxia Bi & Sungyoun Ju
Location: Room Q252, Level 2
License and Booking Required: Yes
Documentation
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