Technical information
- Wavelength: 240nm to 320nm.
- Deep UV contact mask aligner, strongly damped soft UV region.
- Exposure of small pieces and full wafers.
- 4" max wafers.
- Mask sizes 3.5", 4" and 5".
Tool Overview
Responsible: Sarah McKibbin
Location: Room Q161, UVL - Lab (Level 1)
License and Booking Required: Yes
Documentation
Other Links