There are a number of characterisation techniques available in and out of the cleanroom laboratories at Lund Nano Lab.
This includes:
- Scanning Electron Microscopes (SEM) for high resolution surface imaging
- Energy Dispersive X-ray Spectroscopy (EDS) and Electron BackScatter Diffraction (EBSD) for chemical analysis and surface microstructural analysis
- Atomic Force Microscopy (AFM) for topography, nanomechanical and electrical properties
- stylus profilometry for quick and easy surface characterisation
- X-Ray Diffraction (XRD) for characterisation of atomic structure
- ellipsometry for measuring film thickness and optical properties
- several different setups for electrical device characterisation
Below you find many of the different metrology/characterisation tools available to lab users.
By clicking on the tool names you can access a lot of useful information, such as user manuals, what kind of information one can obtain from the different tools, FAQ etc.
The metrology/characterisation section is still a work in progress, for suggestions and questions please contact PB.