Metrology / Characterisation

There are a number of characterisation techniques available in and out of the cleanroom laboratories at Lund Nano Lab.

This includes:

• • Scanning Electron Microscopes (SEM) and Energy Dispersive X-ray Spectroscopy (EDS) for high resolution surface imaging and chemical analysis
  • Atomic Force Microscopy (AFM) for topography, nanomechanical and electrical properties
  • stylus profilometry for quick and easy surface characterisation
  • X-Ray Diffraction (XRD) for characterisation of atomic structure
  • ellipsometry for measuring film thickness and optical properties
  • several different setups for electrical device characterisation

Below you find many of the different metrology/characterisation tools available to lab users.

By clicking on the tool names you can access a lot of useful information, such as user manuals, what kind of information one can obtain from the different tools, FAQ etc.

The metrology/characterisation section is still a work in progress, for suggestions and questions please contact PB.