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Tool Summary

  • Tool Responsible: Dmitry Suyatin

  • Location:  Q261 (Level 2 - outside of Cleanroom)

  • License Required: Yes

  • Booking Compulsory: Yes

  • Tool Information:

Probe station Cascade 11000B for electrical characterization with Keithley 4200A-SCS Parameter Analyzer, Agilent 4294A Precision Impedance Analyzer or your own equipment. ThermoChuck temperature control from -65°C to 150°C. Purge with dry air or nitrogen. 

Safety

User Manuals

Process

Staff Documents


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