Tool Summary
Tool Responsible: Peter Blomqvist & Anders Kvennefors
Location: LNL Q260
License required: Yes
Booking required: Yes
Tool information:
Zeiss GeminiSEM 500
Schottky field emission
Detectors: In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD
Plasma cleaner
Examples - Gemini500
FAQ