Tool Summary
Tool Responsible: Peter Blomqvist & Alexander den Ouden
Location: LNL Q256
License required: Yes
Tool information:
- Bruker D8 Discover XRD-system
- Cu K-alpha radiation
- Goebel mirror and beam compressor
- Eulerian cradle with 4" wafer holder
- PathFinder detector
- Scans: 2T/T, reflectivity, GIXRD, rocking curve, RSM
FAQ