Responsible: Sarah McKibbin and Anders Kvennefors

Location: Room Q158, EVA-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Lamination of dry film resists


  • Loading plate for 4" wafers
  • 65cm laminating width available
  • SUEX films available (testing phase)
  • Temperature control up to 149C



User Manual

Process



View on LIMS