• Main application: flash lamp annealing system using ultrashort flashes
  • Preheating up to 800C via an under stage IR lamp heater
  • 2 upper flash lamps for short pulse heating.
  • Max pulse flash energy: 48J/cm2
  • Pulse duration between 0.3 -13 ms.
  • Controlled vacuum environment.



Responsible: Alexander Den Ouden

Location: Room Q158, EVA-Lab (Cleanroom Level 1)

License and Booking Required: Yes