ZEISS LEO - 1560 Scanning Electron Microscope (SEM)
Schottky field emission gun
In-lens SE & E-T SE detectors
Capable of 1nm resolution at 20kV
4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door
Responsible: Anders Kvennefors
Location: Room Q255 (Level 2)
License and Booking Required: Yes
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