Technical information
- Bruker DektakXT stylus profilometer
- Stylus radius: 2 um
- Max scan area: 55 x 55 mm
- Automated sample stage
Tool Overview
Responsible: ~ftf-pbo
Location: LNL Nanobar (Level 1)
License and Booking Required: Yes, booking required if used more than 30 minutes
Main application: surface profilometry
Documentation
3 Comments
Lab Administrator
2021 Feb 23I had a new user ask the question: can we place a 6" or 9" wafer in this tool and still measure a scan area 55 x 55 anywhere on the sample? Thought it might be good to add in FAQ
Peter Blomqvist
2021 Feb 23Good question, I need to check the max movement of the sample stage/Peter
Peter Blomqvist
2021 Mar 18The sample stage has a maximum XY range of 150mm (6")/PBL