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Technical information
  • Combined focused ion beam and scanning electron microscope with ultra-high resolution
  • Gas injection sources, Pt, W and SiOx
  • Omniprobe nanomanipulator

Tool Overview

Responsible: Peter Blomqvist & Alex den Ouden

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Focused ion beam milling and imaging




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