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Technical information
  • Combined focused ion beam and scanning electron microscope with ultra-high resolution.
  • Gas injection sources, W, Au and SiOx.
  • Omniprobe nanomanipulator. 

Tool Overview

Responsible: Dmitry Suyatin

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Focused ion beam milling and imaging




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