There are a number of characterisation techniques available in and out of the cleanroom laboratories at LNL.
This includes:
- scanning electron and optical microscopes for surface imaging
- atomic force microscopy for topography, nanomechanical and electrical properties
- scanning probe profilometry
- X-ray diffraction for characterisation of atomic structure
- ellipsometry for measuring film thickness and optical properties
- several different setups for electrical device characterisation
Below you find the many of the different metrology tools available. By clicking
