Technical information
- Information about thin film thickness and optical properties
- Wavelength range: 210 - 2500 nm
- Angle range: 45-75 deg
- Focusing optics
- Fully automated alignment
- Sample stage with mapping capability
- Max sample size: 8" diameter
Tool Overview
Responsible: Peter Blomqvist & Sarah McKibbin
Location: Level 1 - LNL Nanobar
License and Booking Required: Yes
Documentation
Other Links