Technical information
- Main application: Large area exposure of regular patterns
- Gratings, square or hexagonal dot arrays
- Monochromatic pulsed excimer laser (193nm wavelenth)
- Resolution below 100nm, Maximum pitch approx. 1.5µm.
- 4" max wafer diameter
- Exposure insensitive to uneven surface.
Tool Overview
Responsible: Sarah McKibbin
Location: Room Q241, New EBL-Lab (Level 2 - Berseilius Lab)
License and Booking Required: Yes
Tool Summary
Tool Responsible: Peter Blomqvist & Anders Kvennefors
Location: LNL Q260
License required: Yes
Booking required: Compulsory
Tool information:
Zeiss GeminiSEM 500
Schottky field emission
Detectors: In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD
Plasma cleaner
Examples - Gemini500
FAQ
Safety
User Manuals
Process
Staff Documents
View on LIMS
Documentation