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Tool Summary

  • Tool Responsible: Dmitry Suyatin

  • Location:  Q156 (Level 1 - EBL room)

  • License Required: Yes

  • Booking Compulsory: Yes

  • Tool Information:

FEI Nova NanoLab 600. Combined focused ion beam and scanning electron microscope with ultra-high resolution. 3 gas injection sources, W, Au and SiOx. Omniprobe nanomanipulator. Installed 2006. Room Q156, Nano-process lab.

Safety

User Manuals

Process

Staff Documents


     View on LIMS - SEM

     View on LIMS - FIB

    




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