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  • Combined focused Ga
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Tool Summary

  • Tool Responsible: Dmitry Suyatin

  • Location:  Q156 (Level 1 - EBL room)

  • License Required: Yes

  • Booking Compulsory: Yes

  • Tool Information:

FEI Nova NanoLab 600. Combined focused
  • ion beam and scanning electron microscope
with ultra-high resolution. 3 gas
  • Gas injection sources, Pt, W
, Au
  • and SiOx
. Omniprobe nanomanipulator. Installed 2006. Room Q156, Nano-process lab.
  • Omniprobe nanomanipulator

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titleTool Overview

Responsible: Peter Blomqvist & Alexander den Ouden

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Focused ion beam milling and imaging


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Safety

User Manuals

Process

Staff Documents



     
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Safety Information

View on LIMS - SEM

     

View on LIMS - FIB

    

FAQ

User Discussion Forum