Tool Summary
Tool Responsible: Dmitry Suyatin
Location: Q158 (Level 1 - EVA room)
License Required: Yes
Booking Compulsory: Yes
Tool Information:
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Responsible: user-44815 Location: Room Q158, EVA-Lab (Cleanroom Level 1) License and Booking Required: Yes Model: Sirus T2 Table-top RIE Supplier: Trion Technology. |
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User ManualsProcessStaff Documents |
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Safety InformationView on LIMSFAQUser Discussion Forum |
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Unprotected surfaces of the following materials are not allowed: glasses, noble metals (Au, Ag, Pt, Cu, Pd), heavy metals (Cd, Pb, Zn) and certain types of polymers (e.g. silicones). |
No wafer clamping. Room temperature processing |
Safety
User Manuals
Process
Staff Documents
View on LIMS
only. |