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changes.mady.by.user Peter Blomqvist

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changes.mady.by.user Alexander Den Ouden

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titleTechnical information
  • Hitachi SU8010 Scanning Electron Microscope (SEM)
  • Cold field emission gun
  • Detectors: In-lens SE & E-T SE, STEM
  • In-situ EBIC & I-V measurements



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Responsible: ~ftf-pbo & Alexander den Ouden

Location: Room Q260, (Level 2)

License and Booking Required: Yes


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Tool Summary

  • Tool Responsible: Anders Kvennefors

  • Location: LNL Q260

  • Maximum wafer size: 

  • FAQ

Safety

User Manuals

Process

Staff Documents

Examples - Hitachi SU8010



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Safety Information 

View on LIMS

    

FAQ

User Discussion Forum