Versions Compared

Old Version 35

changes.mady.by.user Sarah McKibbin

Saved on

compared with

New Version Current

changes.mady.by.user Sarah McKibbin

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.

Image AddedImage Removed


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTechnical information
  • Main application: Large area exposure of regular patterns
    • Gratings, square or hexagonal dot arrays
  • Monochromatic pulsed excimer laser (193nm wavelenthwavelength) 
  • Resolution below 100nm, Maximum pitch approx. 1.5µm.
  • 4" max wafer diameter
  • Exposure insensitive to uneven surface.


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTool Overview

Responsible: Sarah McKibbin

Location: Room Q241Q161, New EBLUVL-Lab (Cleanroom Level 2 - Berseilius Lab1)

License and Booking Required: Yes


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleDocumentation

User Manuals

Process

Examples

Staff Documents



title
Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleOther Links
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid

Safety Information 

View on LIMS

FAQs

Panel

Forum testing, once decided will move into other links

User Discussion Forum

- TDL - contributor summary macro and search function can create a forum like areaUser Forum Option 2 - extra confluence app