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Responsible: Peter Blomqvist & Alexander den Ouden Location: Room Q156, EBL-Lab (Cleanroom Level 1) License and Booking Required: Yes Main application: Focused ion beam milling and imaging |
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Tool Summary
Tool Responsible: Dmitry Suyatin
Location:
Maximum wafer size:
FAQ
User ManualsProcessStaff Documents |
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Safety Information |
View on LIMS - SEM |
View on LIMS - FIB |
FAQUser Discussion Forum |