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Reactive Ion Etching (RIE) system Sirus T2 Plus from Trion Technology Responsible: Dmitry SuyatinResponsible: user-44815 Location: Room Q158, EVA-Lab (Cleanroom Level 1) License and Booking Required: Yes Model: Sirus T2 Table-top RIE Supplier: Trion Technology. |
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User ManualsProcessStaff Documents |
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Safety InformationView on LIMSFAQUser Discussion Forum |
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Unprotected surfaces of the following materials are not allowed: glasses, noble metals (Au, Ag, Pt, Cu, Pd), heavy metals (Cd, Pb, Zn) and certain types of polymers (e.g. silicones). No wafer clamping. Room temperature processing only. | ||||||||||||||
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Safety InformationView on LIMSFAQ |