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titleTechnical information
  • Acceleration Voltages: ?5-? 30 kV.
  • Working Distance: ?- ? mmPattern generator speed: 10Mhz.
  • 6" Max sample size.
  • Minimum resolution: ? 10 nm.
  • Maximum write speedprobecurrent: ?1nA
  • Equipped with thermal field emission cathode and laser interferometer stage.


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titleTool Overview

Responsible: Anders Kvennefors

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes


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titleDocumentation

User Manuals

Process

Staff Documents



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titleOther Links

Safety Information 

View on LIMS

FAQ

User Discussion Forum