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Lund Nano Lab
Thin Films
PECVD - SPTS DELTA LPX APM
Process Development and Thin films Characterization
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changes.mady.by.user
Amirreza Ghassami
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2026 Jan 16
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changes.mady.by.user
Amirreza Ghassami
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Panel
borderColor
#BFB8AF
bgColor
white
titleColor
Black
borderWidth
2
titleBGColor
#DCE9EE
borderStyle
solid
title
Baseline Testing
Thickness Uniformity
Wet Etch Tests
Breakdown Voltage
Panel
borderColor
#BFB8AF
bgColor
white
titleColor
Black
borderWidth
2
titleBGColor
#DCE9EE
borderStyle
solid
title
Common Processes
Overview
Content Tools
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