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titleTool Overview

Responsible: Sarah McKibbin

Location: Room Q161, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Li


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titleTechnical information
  • non-contact direct write lithography.
  • Exposure of small pieces and full wafers.
  • ?" max wafers.
  • 405nm wavelenth.



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titleDocumentation

Documents for the tool



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titleOther Links

View on LIMS