Versions Compared

Old Version 1

changes.mady.by.user Alexander Den Ouden

Saved on

compared with

New Version 2

changes.mady.by.user Alexander Den Ouden

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Image Added


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTechnical information
  • Main application: Cleaning and De-scumming processes
  • Process gases: O2
  • High intensity UV radiation and ozone creates a hydrocarbon free surface
  • 8" max wafer diameter.


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTool Overview

Responsible: Alex den Ouden

Location: Room Q158, EVA-Lab (Cleanroom Level 1)

License and Booking Required: Optional


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleDocumentation

User Manuals

Process

Staff Documents



Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleOther Links

Safety Information 

View on LIMS

FAQs

User Discussion Forum