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titleTechnical information
  • Combined focused ion beam and scanning electron microscope with ultra-high resolution.
  • Gas injection sources, W, Au and SiOx.
  • Omniprobe nanomanipulator. 

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titleTool Overview

Responsible: Dmitry Suyatin

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Focused ion beam milling and imaging


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titleDocumentation

User Manuals

Process

Staff Documents



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titleOther Links

Safety Information

View on LIMS - SEM

View on LIMS - FIB

FAQ

User Discussion Forum