There are a number of characterisation techniques available in and out of the cleanroom laboratories at LNL.
This includes:
- scanning electron and optical microscopes for surface imaging
- atomic force microscopy for topography, nanomechanical and electrical properties
- scanning probe profilometry
- X-ray diffraction for characterisation of atomic structure
- ellipsometry for measuring film thickness and optical properties
- and several different setups for electrical device characterisation
The
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