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Obducat 6inch Nanoimprint Lithography


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titleTechnical information

  • 6" max wafer diameter

  • Combined thermal and/or UV-imprint.

  • Max temperature: 200°C.

  • Max pressure: 60bar.


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titleTool Overview

Responsible: Sarah McKibbin

Location: Room Q161, UVL - Lab (Level 1)

License and Booking Required: Yes



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titleDocumentation

User Manuals

Process

Staff Documents



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titleOther Links

Safety Information

View on LIMS

FAQ


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