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Tool Summary

  • Tool Responsible: Dmitry Suyatin

  • Location:  Q156 (Level 1 - EBL room)

  • License Required: Yes

  • Booking Compulsory: Yes

  • Tool Information:

FEI Nova NanoLab 600.
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titleTechnical information
  • Combined focused ion beam and scanning electron microscope with ultra-high resolution.
3 gas
  • Gas injection sources, W, Au and SiOx.
  • Omniprobe nanomanipulator.
Installed 2006.
  •  

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titleTool Overview

Responsible: Dmitry Suyatin

Location: Room Q156,

Nano-process lab.

EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Focused ion beam milling and imaging


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titleDocumentation
Safety

User Manuals

Process

Staff Documents



     
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Safety Information

View on LIMS - SEM

     

View on LIMS - FIB

    

FAQ