Tool Summary
Tool Responsible: Dmitry Suyatin
Location: Q156 (Level 1 - EBL room)
License Required: Yes
Booking Compulsory: Yes
Tool Information:
FEI Nova NanoLab 600. Combined focused ion beam and scanning electron microscope with ultra-high resolution. 3 gas injection sources, W, Au and SiOx. Omniprobe nanomanipulator. Installed 2006. Room Q156, Nano-process lab.
Safety
User Manuals
Process
Staff Documents
View on LIMS - SEM
View on LIMS - FIB
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